Newports New, Integrated Vertical and Rotation Stage for Wafer Positioning

Irvine, CA – June 14, 2012 – Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, announces a specialized Integrated Vertical and Rotation Stage, the ZVR. Ideal for semiconductor wafer positioning, metrology, inspection, and repair, it is also useful in LED production and applications such as 3D scanning, digitizing models, and validation. Newports ZVR features a compact and rigid design with improved cantilevered load capacity. With significantly lower cross-talk than earlier designs, the new stage delivers higher dynamic system performance in a very low-profile footprint. The low mass, along with a high natural frequency, accommodates a variety of rapid step-and-settle positioning applications.

Newport Announces the Industrys First Family of Air Bearing Stages for 450mm Wafere

Initiative - DynamYX® Datum TM 450 and 450GT Irvine, CA – July 9, 2012 – Newport Corporation, a worldwide leader in advanced motion control solutions, introduces the industrys premier line of high-performance air bearing stages specifically designed for the 450mm semiconductor wafer initiative. The new DynamYX® DatumTM 450 and 450GT are based on Newports proven DynamYX 300-series wafer processing and inspection platforms with more than 1,000 worldwide installations. They are perfectly suited to handle the larger travel ranges, payloads, and increased throughput requirements of next-generation 450mm tools. The DynamYX Datum 450 and 450 GT deliver high resolution, dynamic positioning of a wafer chuck or similar substrate in two orthogonal translation axes from a single-plane carriage. For added flexibility, a vertical Z-axis with tip/tilt function and a rotary axis for wafer offset correction can be added on the carriage beneath the wafer chuck. Other options are available for encoder and interferometer feedback, if required.

Newport Introduces XPS Optimized G-Code Conversion Software

Irvine, CA – August 14, 2012 – Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, introduces the XPS-GCODE Conversion Software, a simple and intuitive new interface that works with Newports XPS Universal Motion Controller. The software can read, convert, and edit G-code and execute in the XPS controller, utilizing advanced features of the XPS to make it a powerful laser machining center. The new conversion software features a 3D display with a real-time, active tool indicator; it generates smooth motion routines along optimized trajectories with controlled velocity. Once the laser is activated, additional XPS control is available utilizing the multiple digital and analog input/output devices. For real-time process control, Newports new software is Windows-compatible and communicates over TCP/IP.